Yashowanta N Mohapatra

Professor Emeritus


Curriculum vitae



+91 512 259 7033


Physics

IIT Kanpur

Department of Physics
IIT Kanpur
Kanpur - 208016
India



Proton beam writing for minimum step lithography in multilayer patterning


Journal article


Mihir Sarkar, N. Shukla, N. Banerji, Y. N. Mohapatra
Other Conferences, 2012

Semantic Scholar DOI
Cite

Cite

APA   Click to copy
Sarkar, M., Shukla, N., Banerji, N., & Mohapatra, Y. N. (2012). Proton beam writing for minimum step lithography in multilayer patterning. Other Conferences.


Chicago/Turabian   Click to copy
Sarkar, Mihir, N. Shukla, N. Banerji, and Y. N. Mohapatra. “Proton Beam Writing for Minimum Step Lithography in Multilayer Patterning.” Other Conferences (2012).


MLA   Click to copy
Sarkar, Mihir, et al. “Proton Beam Writing for Minimum Step Lithography in Multilayer Patterning.” Other Conferences, 2012.


BibTeX   Click to copy

@article{mihir2012a,
  title = {Proton beam writing for minimum step lithography in multilayer patterning},
  year = {2012},
  journal = {Other Conferences},
  author = {Sarkar, Mihir and Shukla, N. and Banerji, N. and Mohapatra, Y. N.}
}


Share

Tools
Translate to