Electron beam lithography in thick negative tone chemically amplified resist

Journal article

Mihir Sarkar, Y. N. Mohapatra
2014

Semantic Scholar DOI

Cite

APA Click to copy
Sarkar, M., & Mohapatra, Y. N. (2014). Electron beam lithography in thick negative tone chemically amplified resist.

Chicago/Turabian Click to copy
Sarkar, Mihir, and Y. N. Mohapatra. “Electron Beam Lithography in Thick Negative Tone Chemically Amplified Resist” (2014).

MLA Click to copy
Sarkar, Mihir, and Y. N. Mohapatra. Electron Beam Lithography in Thick Negative Tone Chemically Amplified Resist. 2014.

BibTeX Click to copy

@article{mihir2014a,
  title = {Electron beam lithography in thick negative tone chemically amplified resist},
  year = {2014},
  author = {Sarkar, Mihir and Mohapatra, Y. N.}
}